聚焦離子束顯微鏡（SII NANOTECH SMI3050）
| Number | 9 |
| Location | Materials Science Laboratory Building L111 |
| Purpose |
(1) Precisional Cutting-use the physical collision of particles to achieve the purpose of cutting
(2) Selective Deposition-Decompose organic metal vapor or vapor-phase insulating material with the energy of ion beam
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| Person in charge | 陳捷婷 |
| Contact Email | julia6131998@gmail.com |
| Phone | 03-5715131#35398 |