Electron Spectroscopy For Chemical Analysis (ESCA) (ULVAC-PHI PHI 5000 Versaprobe II)
| Number | 18 |
| Location | Material Science & Technology Building R133 |
| Purpose | Surface qualitative and quantitative analysis, chemical shift analysis, depth profile |
| Person in Charge | 劉世福 |
| Contact Email | a2132151518@gmail.com |
| Phone | 03-5715131#33808 |