時間

活動內容

講員

10:00-11:00

Recent Achievements and New Technologies for High Performance MEMS Sensors and Actuators

Dr. Philippe Robert

Microsystems, CEA-Leti, Grenoble, France

(註：CEA-Leti MEMS RD 的 leader)

11:00-12:00

Unconventional Heterogeneous Integration and Manufacturing Technologies for MEMS and NEMS

Prof. Frank Niklaus

Micro and Nanosystems, KTH Royal Institute of Tech, Stockholm, Sweden

(註：將擔任Transducers 2025的TPC Chair)

14:00-15:00

Micro and Nanosystems: An Enabling Key Technology for the 21st Century

Prof. Michael Kraft

MICAS/ESAT, KU Leuven, Leuven, Belgium

(註：接任Prof. B. Puers的KUL MEMS leader)

15:00-16:00

Applied MEMS Research and Development: From Silicon Microphones for Commodity to Custom Specific MEMS for SMEs

Prof. Alfons Dehé

Microsyst. Eng, U of Freiburg,

Hahn-Schickard Inst., Freiburg, Germany

(註：Infineon Microphone 開發的主要負責人)