| Number | 18 |
| Location | Material Science & Technology Building R121 |
| Purpose | Surface qualitative and quantitative analysis, depth profile, micro-area analysis, atom mapping, line scan, fracture surface analysis |
| Person in Charge | Lin, Er-Zhen 林爾震 |
| Contact Email | g54515@m99.nthu.edu.tw |
| Phone | (03)5715131#35326 |