| Number | 16 |
| Location | Materials Science & Technology Building R129-A |
| Purpose | EPMA can do micro area qualitative analysis and quantitative analysis of metal materials, electro materials, ceramics, minerals. EPMA can detect characteristics X-ray, secondary electron, backscattering electron image within a large area and high magnification (up to 100,000X) and the accuracy is higher than common EDS which makes EPMA a fine tool of microanalysis. |
| Person in Charge | 宋瑞文 |
| Contact Email | sourgein@gmail.com |
| Phone | 03-5715131#33857 |