| Number | 12 |
| Location | Materials Science & Technology Building R125-A |
| Purpose | Qualitative and quantitative analysis of crystalline phase, analysis of multilayer film properties, analysis of particle or hole distribution |
| Person in Charge | Lee, Jiazhang 李佳璋 |
| Contact Email | john6030212@hotmail.com |
| Phone | 03-5715131 #33863 or #33892 |