| Number | 8 |
| Location | Materials Science Laboratory Building R112 |
| Purpose |
(1) Precisional Cutting-use the physical collision of particles to achieve the purpose of cutting
(2) Selective Deposition-Decompose organic metal vapor or vapor-phase insulating material with the energy of ion beam
|
| Person in charge | Yang, Ziyi 楊子逸 |
| Contact Email | joeyang0422@gapp.nthu.edu.tw |
| Phone | 03-5715131#35398 |