| Number | 4 |
| Location | Materials Science Laboratory Building L110-D |
| Purpose | The sample surface and near surface provide images with high resolution and long depth of field, which can quickly provide very fine images. |
| Person in charge | 彭毓仁 |
| Contact Email | elipeng@gapp.nthu.edu.tw |
| Phone | 03-5715131#35398 |